Vacuum chambers of electron storage rings are generally made of aluminum alloys. Beam life time is limited by dynamic outgassing from the chambers due to irradiation of synchrotron radiation. Such condition of vacuum is namely “Hot Vacuum”. Surface contamination of the aluminum alloy was removed by ion beam etching. Therefore dynamic outgassing of the aluminum alloy material was reduced three order. Organic material and air were damaged and decomposed synchrotron radiation. In the mixture of organic material, air and water, the strong acids such as HCl, HF, HNO3, and H2SO4 are made and attack on the metal components. These processes are radiation corrosions. Ceramic coating such as SiO2 is one of anticorrosive treatments for the metal components.
