Reflection High-Energy Electron Diffraction (RHEED)

Abstract

Principle and characteristic of reflection high-energy electron diffraction (RHEED) are described paying to the relations between RHEED patterns and surface morphologies. Some examples indicating the relations are shown. Micro-probe RHEED is also described, in which focused electron beams are used for obtaining crystalline information from surface micro-areas. An in situ observation result of Si thin film growth is shown as an example.