Versailles Project on Advanced Materials and Standards (VAMAS project) was set up in 1982. Since then, 22 Technical Working Areas have been established, one of which was Surface Chemical Analysis, In the VAMAS project, the accuracy of quantitative analysis by Auger Electron Spectroscopy or X-ray Photoelectron Spectroscopy was examined by Inter-Laboratory Study, and the “standard” procedures for the quantitative analysis have been proposed. These proposed procedures were passed to ISO, and some of these have been ISO standards after the discussions in TC 201. In this paper, the activities of VAMAS and ISO are introduced, and the proposed calibration procedures for the energy and intensity scales of the electron spectroscopy are explained. The software to share spectra with ISO format is also briefly explained.
