研究論文
1.5 MPaまで加圧された超流動ヘリウム中におけるシリコン圧力センサーの特性
2003 年 38 巻 3 号 p. 129-134
詳細
2003 年 38 巻 3 号 p. 129-134
It is known that a piezo-resistive pressure sensor, FPS-51B manufactured by Fujikura Ltd., is available for ‘in situ’ pressure measurement in superfluid helium. The sensor covers a pressure range of zero to 103.4 kPa. The maximum rated pressure is 202.6 kPa at room temperature. The characteristics of the pressure sensor in a pressure range up to approximately 0.2 MPa were reported in detail for use in superfluid helium3,4). We measured the pressure characteristics of this sensor up to 1.5 MPa to determine its availability to be used under much higher pressure. Measurements were taken using a cryostat, which can be pressurized up to 1.5 MPa at room temperature and superfluid helium temperatures. It was proven that the sensor could be used in a superfluid helium environment of up to 1.5 MPa without any damage, and good reproducibility was shown for high pressures of up to 1.5 MPa.
