スピンコート法によるYBa₂Cu₃O_7-δ薄膜の作製における2段階昇温の有効性

抄録

We examined the two-step annealing for YBCO thin-film preparation using the spin-coating method, and proved its effectiveness. High-rate annealing (∼120°C/min) for first annealing (<720°C)is requires, in order to reduce the grain growth of a axis-oriented grains of YBCO, and we need a low-rate annealing (∼2°C/min) is needed for the second annealing step (720∼760°C) in order to increase the grain growth of c axis-oriented grains of YBCO. The T_c of YBCO/CeO₂/Al₂O₃ is approximately 89 K, and R_s at 10 K, and at 38 GHz is 3.1 mΩ.