Improvements in superconducting device characteristics using laser-etching trimming is examined. A KrF excimer laser (248 nm) was used. As an example, improving the bandwidth of a superconducting patch antenna with gap-coupled resonators and that insertion loss of a 3-pole hairpin-type superconducting filter were studied. We found that laser-etching trimming is quite useful for improving the antenna and filter properties; increasing the bandwidth and reducing return loss with the antenna, and reducing loss with the filter.
