低温工学
Online ISSN : 1880-0408
Print ISSN : 0389-2441
ISSN-L : 0389-2441
研究論文
低損失コンデンサに向けたBaTiO3/REBa2Cu3Oy 積層構造の誘電特性
森口 凱安土屋 雄司一野 佑亮吉田 隆
著者情報
キーワード: REBa2Cu3Oy, BaTiO3, thin film, capacitor
ジャーナル フリー

2021 年 56 巻 1 号 p. 32-37

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A high Q value for resonant circuits is necessary for wireless power transfer. The resistance in the circuit degrades the Q factor; thus, it is important to use elements with a low internal resistance such as superconductors. In this study, we focused on reducing the internal resistance in capacitors by using superconducting electrodes. We fabricated a multilayered structure with epitaxially grown BaTiO3 films on biaxially oriented YBa2Cu3Oy films and measured the superconducting and dielectric properties. As a result, the multilayered film showed superconducting transition at 86.1 K and a large reduction in ESR at temperatures below 90 K. The temperature dependence of the capacitance density peaks at 265 K and coincides with the structural phase transition of BaTiO3. The relative permittivity εr of the multilayered structure was 1.9-23.3, possibly due to a lower crystalline orientation.

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