テーマ解説
半導体向け単結晶引上げ装置用超電導マグネットの開発
2026 年 61 巻 3 号 p. 78-81
詳細
2026 年 61 巻 3 号 p. 78-81
The Magnetic Czochralski method uses strong magnetic fields to suppress convection in molten silicon, enabling the growth of high-quality, large-diameter ingots required in advanced semiconductor wafer production. Cryocooler-cooled superconducting magnets have been developed to eliminate the need for liquid helium, thereby achieving operational simplicity and cost efficiency. Integrating 4K-GM cryocoolers and HTS current leads, combined with advanced 3D automated winding technology, has reduced conductor usage and improved flexibility in magnetic field design. Future work should address larger bore magnets and specialized field configurations to meet the evolving demands of semiconductor manufacturing.
