半導体加工工場からの廃液処理
2002 年 37 巻 7 号 p. 338-342
詳細
2002 年 37 巻 7 号 p. 338-342
The abrasives have been recovered from the slurry wasted by the factory where the silicon wafers for solar batteries are processed. The separator has been designed and developed for a practical application of superconducting magnetic separation. The SiC abrasives to which iron fragments of the wire adhere were separated. The iron particles from the wire sawing machine were also separated. The abrasives were successfully separated, and the wasted slurry could be recovered.
