抄録
A new pneumatic cylinder on which a micro optical encoder chip was mounted was developed. The cylinder has a position detecting function and makes position/force servo systems possible. The structure of the cylinder is very simple and the size is almost the same as that of a conventional cylinder with the same specifications. Cylindrical stripe codes, typically having a 0.169mm pitch, were fabricated on the piston rod surface through a fine oxidization process with a YAG laser and were detected by the optical encoder. Two prototype models were designed and developed for both human machine interfaces and for industrial uses. A compact controller based on a PSoC was also developed for them. Three typical control algorithms, force control, position control, and an adaptive position control are developed and shown in this paper. The results of servo experiments using them show that the servo systems work very well.
