スクリーン印刷型銅配線腐食センサーによる結露環境の腐食モニタリング

抄録

An impedance–response copper wiring corrosion sensor (ICCS) was developed for the corrosion monitoring in the condensation environment. The sensor was fabricated by a screen printing technique and composed of two symmetrical zigzag conducting parts. The impedance response of the ICCS was investigated in the wet–dry condition. The impedance spectrum described the loop related to the copper wiring/electrolyte solution interface in the wet condition. The diameter of the loop became small in the drying process, and impedance was converged to the low frequency limit when the electrolyte solution was completely dried. The loop was observed again on the Nyquist plane in the wet condition. These results indicate that the ICCS can be monitored the condensation environment. Amounts of corrosion were calculated from the impedance of the ICCS at low frequency limit, demonstrating that the changes of the amounts of corrosion were related to the oxygen supply on the water film formed on the ICCS.