The Journal of Japan Institute for Interconnecting and Packaging Electronic Circuits
Online ISSN : 1884-1201
Print ISSN : 1341-0571
ISSN-L : 1341-0571
Silicon Micromachined Micro-Optical Bench
Yuji UENISHI
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JOURNAL FREE ACCESS

1995 Volume 10 Issue 5 Pages 361-365

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