日本金属学会誌
Online ISSN : 1880-6880
Print ISSN : 0021-4876
ISSN-L : 0021-4876
ランタン膜の水素化・脱水素化に伴う構造変化
前田 幹雄越後谷 淳一山口 明
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2004 年 68 巻 9 号 p. 776-780

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Structural change in hydrogenation and dehydrogenation processes of La films was investigated. La/Pd films were produced at substrate temperatures of 300 K-573 K on a SiO2 substrate using magnetron-sputtering equipment. La/Pd films were hydrogenated under a pressure of 1.0×105 Pa in a vacuum chamber. Phase transition from La to LaHx (2<x<3) by hydrogenation resulted in a 6- to 10-fold increase of resistivity. Hydrogenation and dehydrogenation readily occurred near room temperature for La/Pd films. The ratio of the growth direction of [0001] to [1010] changed with substrate temperature in the as sputtered La films. When the growth direction of La film was [1010], the rate of hydrogenation became slow in comparison with that of [0001]. The direction of the La films changed to the [111] direction of LaHx after hydrogenation, though the initial directions of La films were [0001] and [1010]. The processes of hydrogenation and dehydrogenation may affect oxygen which remains inside the La films. In dehydrogenation at room temperature, LaHx (2<x<3) was transformed to LaH2, but not to La.

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© 2004 (公社)日本金属学会
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