Sm-Fe合金薄膜の超磁歪特性に及ぼすスパッタArガス圧の影響
2005 年 69 巻 4 号 p. 373-376
詳細
2005 年 69 巻 4 号 p. 373-376
Sm-Fe alloy thin films were prepared by DC magnetron sputtering process. The atomic ratio of Sm-Fe film was varied from SmFe2.4 to SmFe2.0 with increasing Ar gas pressure from 0.2 to 1 Pa. A magnetostriction of the SmFe2.2 film increased with decreasing Ar gas pressure.
