銅基板の両側にFe-Pd(引張)-Fe-Sm(圧縮)磁歪薄膜を蒸着した三層運動素子の見掛けの磁歪とその感受率

抄録

  Composite mover device constructed with both positive and negative magnetostrictive thin films on each side surface of copper substrate are prepared by direct current magnetron sputtering process. The magnetic field induced the mover strain (apparent magnetostriction) of composite mover film at 1200 kA/m of magnetic field is 1800 ppm and is two times larger than the sum of magnetostriction values of Fe-Pd positive and Fe-Sm negative magnetostrictive thin films.