FeCo-AlF 系ナノグラニュラー薄膜の TMR と耐熱性の向上

抄録

  We investigated tunnel magnetoresistance (TMR) properties to improve their thermal stability using FeCo-AlF, a new metal-insulator nano-granular thin film for GIGS^® (granular in gap sensor), a highly efficient power-saving magnetic sensor. These system films exhibit granular type TMR properties, and Fe₂₅Co₁₉Al₁₇F₃₉ film has a 12% TMR ratio. The thermal stability of the TMR properties is greatly improved by adding of small amounts of Si to FeCo-AlF. Although the TMR ratio of Fe₂₃Co₁₇Al₁₃F₄₇ film deteriorates from 550K, Fe₂₂Co₁₈Si₃Al₁₆F₄₁ film retains its TMR ratio up to 600 K.