イオンプレーティング法による Fe-In 過飽和固溶体薄膜の作製

抄録

  In this study, Fe-In (Fe-IIIB system) alloys of ferromagnetic thin films with supersaturated indium concentration were prepared by a triode-type ion-plating process with dual vapor sources. The preparation of the supersaturated Fe-In thin films was discussed on the basis of the effects of excess energy on the nanostructure of thin films. The kinetic energy of ions and the ionization rate in evaporation particles were measured using a Langmuir probe and a Faraday cup respectively. The excess energy of IP process increased with increasing applied bias voltage of discharge electrode. In X-ray diffraction analysis, crystal structures of supersaturated film samples were shown to be α-Fe bcc structures of Fe solid solution alloy. The ion-plating process can control the solubility limit and nanostructure of Fe alloy thin films.