論文
Si単結晶のマイクロトライボロジーに及ぼす雰囲気と温度の影響
キーワード:
silicon single crystal,
microtribology,
atomic force microscope,
transmission electron microscope
2020 年 84 巻 9 号 p. 304-309
詳細
2020 年 84 巻 9 号 p. 304-309
Microtribology of silicon single crystals is one of the key technologies from the viewpoint of reliability of practical application in micro electro mechanical system (MEMS). In the study, a silicon single crystal (100) wafer was scratched by a silicon single crystal tip under a very small loading force in various atmospheres and temperatures, which was characterized using an atomic force microscope. In air and water, the silicon single crystal tips were worn greatly. However, the morphology of the scratched wafer surface was quite different; in air the scratched area of the wafer surface was forming a terrace. In vacuum, the tips were worn slightly. In terms of the effects of temperature, the silicon single crystal softened at 473 K was worn. At 673 K, the silicon single crystal wafer was worn greatly and stick-slip like phenomenon occurred between the silicon single crystals significantly softened. As a result, microtribology is affected by atmospheres or temperatures.
