1984 年 48 巻 7 号 p. 735-741
The bonding charactor between ceramic coating and metal substrate is important from the viewpoint of application to high temperature machine parts such as the first wall coating of nuclear fusion devices. Reaction zone structures of vacuum annealed 316L stainless steel coated with TiC by CVD process were investigated. The samples were annealed in vacuum of about 10−4 Pa at 1173-1473 K for 36-720 ks. The diffusion and reaction zones near the interface were investigated by XMA and SEM. (Ti, Mo)C solid solution and FeTi intermetallic compound in the TiC matrix and (Cr, Ti, Fe)7C3 carbide and precipitated TiC solid solution in stainless steel were identified.
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oindentSmall pores were observed in the reaction zone, suggesting that they were caused by the Kirkendall effect. The diffusion of Mo and Fe in TiC was found to proceed by grain boundary diffusion followed by bulk diffusion.