活性金属法による窒化物セラミックスと金属の接合機構

抄録

Joining nitride ceramics to metals was tried using various brazing alloys containing titanium. Ti-Ag-Cu and Ti-Cu brazing alloys showed good bondability to both silicon nitride and aluminum nitride. The microstractural and compositional change in the joints were investigated by X-ray diffraction, scanning electron microscopy, auger electron microscopy and other analytical methods.
It was found that these ceramics were decomposed by titanium into metals and nitrogen, and titanium nitride was produced at the interface of the ceramics and brazing alloy. The titanium nitride surface seemed to be very rough. Therefore it is considered that, after titanium nitride was produced the molten brazing alloy flowed into these rough surfaces and made micro-mechanical bonds.
Aluminum nitride on which surface titanium nitride was produced using Ti-Cu brazing alloy, could bond to metal using conventional silver brazing alloy or nickel brazing alloy.