TiN被覆珪素鋼板の磁気特性に及ぼす表面前処理の影響

抄録

In order to clarify the influence of the pre-treatment on the magnetic properties of TiN-coated silicon steel sheets, various acid treatments on the silicon steel sheets were done prior to the TiN coating by the HCD method.
With chemical polishing prior to TiN coating, the iron loss W_17⁄50(W/kg) of the TiN-coated silicon steel sheets was dramatically improved by 0.20-0.24 W/kg. In contrast, with the pre-treatments with 10%H₂SO₄ and 10%HCl solutions, the improvement of W_17⁄50(W/kg) was reduced to 0.1-0.14 W/kg. Also, the improvement of W_17⁄50(W/kg) in the pre-treatment with the H₂SO₄ solution was less than that with the HCl solution.
By the pre-treatments with 10%H₂SO₄ and 10%HCl solutions, the value of W_17⁄50(W/kg) became lower than that of a silicon steel product, but by subsequent TiN coating both We and Wh were improved. However, the improvement of W_17⁄50(W/kg) due to the pre-treatment with these acid solutions showed 60-70% of that in the case of chemical polishing.
The thin-film X-ray diffraction in the 111 peak intensity of TiN became weaker in the order of chemical polishing, the 10%HCl solution and the 10%H₂SO₄ solution, and in the latter case showed 200, 220 and 311 peaks of TiN.