Fe-Ta-C系磁性薄膜の構造および磁気特性に及ぼす熱処理の影響

抄録

The influence of heating treatment on the crystal structure and magnetic properties of Al doped Fe-Ta-C nano-crystalline thin films were studied. Crystal Plane orientation of Fe in 9.8 mol%Al-doped Fe-Ta-C film changed from (110) to (200) and Hc increased after pre-annealing at 663 K which is lower than the crystallization temperature. Preffered orientation of Fe crystal Plane changed from (110) to (200) by substrate heating also. The crystal structure and magnetic properties changed very little when the heating rate from room temperature to the crystallization temperature of 863 K was 0.06∼0.15 K/s. On the other hand, when the cooling rate to room temperature from 863 K was 0.06∼0.30 K/s, TaC crystalline particle size at the lower cooling rate of 0.06 K/s was found to be larger than that at the higher cooling rate. The magnetostriction of Fe in 9.8 mol%Al-doped Fe-Ta-C thin film also increased to 1.8×10⁻⁶, at the cooling rate of 0.30 K/s.