The electrochemical corrosion tests of DLC films formed on aluminum substrates by ionization deposition method have been performed to evaluate their ability as a protective coating for electronic devices. In addition, the testing results of DLC/Al obtained in this work have been compared with those of SiO2/Al and SiN/Al. The main results obtained in this study are as follows; (1) The electrochemical corrosion behavior of DLC/Al becomes considerably similar to that of SiN/Al and different from that of SiO2/Al. It has excellent anti-corrosion property. (2) Some corrosion pits under the pinhole defects of DLC/Al after potentiodynamic anodic polarization of DLC/Al are linked together. In other words, the morphological character of DLC/Al shows mixed types of SiO2/Al and SiN/Al. (3) According to the above results, the authors have proposed three type of corrosion models about DLC/Al, SiO2/Al and SiN/Al, respectively.
