Journal of the Japanese Association for Crystal Growth
Online ISSN : 2187-8366
Print ISSN : 0385-6275
ISSN-L : 0385-6275
TiSi_2/Si Interface Instability in Plasma-assisted CVD of Ti
Y. OhshitaK. Watanabe
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1998 Volume 25 Issue 3 Pages A20-

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© 1998 The Japanese Association for Crystal Growth
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