Journal of the Japanese Association for Crystal Growth
Online ISSN : 2187-8366
Print ISSN : 0385-6275
ISSN-L : 0385-6275
Chemical Reaction of Fused Quartz with the carbon susceptor in the silicon Cz Furnace During the pulling Process.
M. KatoS. MaedaK. AbeH. NakanishiK. Terashima
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1998 Volume 25 Issue 3 Pages A74-

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Abstract
Quartz reacts with carbon on the contact area at high temperature. This reaction will get deterioration of the quartz crucible and the carbon suscepter during the pulling process. one of effective means of study the deterioration phenomenon, we measured the weight variations of crucible and carbon suscepter. It was found that the reaction of quartz and carbon is dissociation reaction. The dominant chemical reaction has been determined to be siO_2 + C → SiO↑+ CO↑.
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© 1998 The Japanese Association for Crystal Growth
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