日本結晶成長学会誌
Online ISSN : 2187-8366
Print ISSN : 0385-6275
ISSN-L : 0385-6275
小型のシリコンCZ炉内の酸素輸送とマランゴニ効果(<小特集>バルク成長分科会特集 : 結晶成長時における気液界面の物質移動と結晶に与える影響)
今石 宣之李 明偉塚田 隆夫
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2000 年 27 巻 5 号 p. 281-287

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This article discusses the influence of the Marangoni effect on melt flow and oxygen transport in a small silicon Czochralski furnace, based on recent results of global simulation conducted by the authors. Oxygen transfer rate is controlled by the mass-transfer resistances in melt and gas phases. The Marangoni effect exerts a significant change of flow pattern of melt near the gas/liquid interface. The Marangoni effect takes an important roll in modulating the distributions of temperature and oxygen concentration near the interface and consequently the over-all oxygen transport rate. Installing a heat shield provides large shear stress onto the melt surface from the gas flowing along.The Marangoni effect counteracts the stress and minimizes the induced eddy flow and increases oxygen evaporation rate.

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© 2000 日本結晶成長学会
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