レーザライトシート用のビームプロファイラの開発

抄録

This paper describes concerning a developed beam profiler for laser light sheet. The beam profilers measure an energy distribution and beam shape. Generally, CCD and NMOS et al. as an image sensor are utilized for measurement of the beam profile. In the case of commercially available beam profiler, measurable beam cross-section is limited about the surface of the light-detecting element. However, the laser light sheets for particle image velocimetry and exposure light of IC have large spread angle. Then, it is not possible to measure the beam profile by using the commercial equipment. To overcome this situation, the beam profiler for laser light sheet with large aspect ratio is newly developed.