Beam characteristics of a microwave discharge ion thruster were measured by several kinds of beam analyzers for the purpose of comparing its efficiencies with conventional DC discharge ion thrusters. Propellant utilization, ion cost, doubly charged ion fraction, and beam divergence were evaluated with throttling parameters, resulting in thrust efficiency of 64% when the microwave ion thruster was operated at the condition of mass flow rate of 1.6sccm, microwave power of 45W and acceleration voltage of 1.5kV.