格子投影法を用いた高さ測定装置における計測精度予測手法の提案

抄録

   The purpose of this study is to propose predictive method of the measuring precision of the depth measuring microscope using a technique that combines a whole-space tabulation method (WSTM) and light-source stepping method. The WSTM excludes almost all of systematic errors such as the influence of a lens distortion and deformation of the brightness distribution of the projected grating from the measured result. Therefore, it becomes possible to predict the precision of a measurement device by only considering the random error caused by camera noise and caused by reflectance characteristics of the surface of an object. In this study, a precision prediction method for depth measuring microscope using grating projection method is proposed. The effectiveness of the predictive method is verified by comparing the predicted precision and the measuring precision. The theory and experimental results are shown.