抄録
A sampling moiré method is applied to a dynamic deflection angle distribution measurement. The accuracy of phase difference analysis using the sampling moiré method is from 1/100 to 1/1000 of the grating pitches. 2D phase distributions of the 2D grating are also obtained with the sampling moiré method. 2D phase difference before and after the deformation gives the displacement at the point and the 2D phase gives the coordinates at the point when the grating pitch is known. Authors proposed an analysis method of a rotation angle from the 2D phase difference distribution and the 2D phase distribution. In this paper, the analysis method of a rotation angle is applied to the dynamic deflection angle distribution measurement of a cantilever. The results are compared with the results obtained using laser displacement meters.
