解 説
光プローブを用いた形状測定の高精度化
キーワード:
Optical probe,
Profile measurement,
Measuring accuracy,
Astigmatic method,
Measuring resolution
2018 年 18 巻 1 号 p. 3-9
詳細
2018 年 18 巻 1 号 p. 3-9
Demands for machining of precision parts have recently increased. In order to meet such requirements, not only ultra-precision machining systems, but also precision profile measuring systems are required. In the profile measurement of precision parts, since the measurement marks have a large influence, a completely non-contact shape measurement method free from measurement marks is required. In the profile measurement using the optical probe, the profile of a specimen is measured by keeping the distance between a lens and a surface constant while scanning. Since the importance of measuring the complex three-dimensional shape increases, the importance of an optical probe that can measure such a shape in a non-contact condition increases. In this paper, problems and research examples in profile measurement using optical probes with high measuring accuracy are explained.
