2019 年 19 巻 1 号 p. 24-29
A method to measure the strain of a single-walled carbon nanotube (SWCNT) under tensile load using mirco Raman spectroscopy is reported. The method includes a micro-electro-mechanical system based tensile test stand (MEMTES) with a thermal actuator, assembly using dielectrophoresis and clamping by electroless gold deposition. The MEMTES was fabricated from a silicon-on-insulator wafer, whose device layer of 5-μm thick was used as the test stand structure. It applies tensile load to SWCNT more than 10% in strain. SWCNT was assembled by applying ac voltage at the gap of MEMTES and was fixed by covering gold thin film through electroless deposition. Raman spectra were measured while an assembled SWCNT was being loaded by actuating the Chevron-type thermal actuator. As a result, we observed a downshift of the G+-band and the change was -2.1 cm-1/% to -4.1 cm-1/% against the tensile strain up to 2 %. Due to bundling of SWCNT and insufficient fixing force at the ends, the downshift was decreased at the strain more than 2% and the tensile strength was not measured.
