2022 年 22 巻 2 号 p. 124-127
Al/Ni multilayers are attracting much attention as a local heat source for wafer bonding. However, after reactively bonding, cracks are introduced in reactively alloyed NiAl due to its brittleness and volume shrinkage. In this study, B contained Al/Ni multilayers are deposited by sputtering and the effect of B addition on mechanical characteristics and fracture of reactively alloyed NiAl film is investigated. 0.1wt% B is contained in alloyed NiAl compound after Bincluded Al/Ni film’s exothermic reaction. Cantilever bending testing is performed for investigating the Young’s modulus and fracture strength. Crack propagation testing is also performed to examine the effect of B containing on the fracture toughness. Transmission electron microscopy suggests that B segregation at the triple point of crystal grains is effective for crack propagation restriction on grain boundaries.
