反射率温度依存性を用いた2波長レーザー光反射強度計測による非接触温度測定の高感度化

抄録

In this study, as an approach to improve the potential problem of a noncontact temperature measurement based on Thermoreflectance (TR) method, we attempted to apply a two-wavelength thermoreflectance (2WTR) method to improve sensitivity and uncertainty of measured temperature value. First, we developed an optical system for reflectance measurement by using two laser beams which enable us to measure the two laser beams simultaneously and separately. And then, we try to measure 200 nm thick Au film on Silicon substrate and investigate the temperature dependency of the reflectance coefficient. The measurement results show 1.22 times increase in measurement sensitivity and a 15.8% reduction in temperature uncertainty compared to conventional one wavelength measurements.