Lecture
Computational Simulation for Planarization of Glass Surface : Proposal of Design Principles for Alternative Abrasive Grain of CeO2
Keywords:
chemical mechanical polishing,
first-principles calculation,
molecular dynamics,
CeO2,
alternative abrasive grain,
SiO2,
perovskite oxide
2012 Volume 78 Issue 11 Pages 941-946
Details
Article 1st page
