Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
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Smoothing of Single Crystalline SiC and GaN by Catalyst Referred Etching
Kazuto YAMAUCHI, Yasuhisa SANO, Kenta ARIMA
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Keywords: SiC, GaN chemical etching, flattening, catalyst referred etching
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2012 Volume 78 Issue 11 Pages 947-951

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