ストレートエッヂによる定盤の平面度の測定

抄録

This paper describes the method of flatness measurement of surface plates by means of a straight edge and an indicator with 0.001 mm graduation.
The straight edge is supported with two gauge blocks on the surface plate. The measuring spindle of the indicator moving along the straight edge is in contact with the surface plate, in order to measure its straightness in any direction. In the preceding papers, it was discussed how the deflection of straight edge is minimum. In this paper, the results are applied to the flatness measurement of surface plate. The experiments show that if the straight edge is supported on two points according to the invented method, the flatness of surface plate smaller than 1000 mm×1000mm is measured within accuracies specified in JIS (f.i. 1 st grade 13μ and 2 nd grade 32μ in 1000 mm × 1000 mm) by this method.