真空雰囲気の空気マイクロメータ
1971 年 37 巻 441 号 p. 749-753
詳細
1971 年 37 巻 441 号 p. 749-753
Described in this paper, is a pneumatic method of gauging a very short length placed in a vacuum room. In this micrometer, air flows from the atmosphere into an intermediate chamber through a filter and an orifice, and then leaks into the vacuum chamber through a measuring nozzle. The variation of the gap between the nozzle and its counterface causes the pressure change of the intermediate chamber. Both static and dynamic performance of the micrometer is concretely studied with experimental examples.
