真空雰囲気の流体マイクロメータの特性とその供給圧との関係

抄録

This paper is concerned with transfer characteristics of a fluidic micrometer of gauging a very small displacement in vacuum space. In the micrometer, gas flows from a constant pressure supply chamber into an intermediate chamber through an orifice, and then leakes into the vacuum space through a gap between a nozzle and its counter face to be measured. Both static and dynamic performance of the micrometer is studied in relations o the supply pressure up to 200 k Pa with experimental examples. The results are as follows; the static characteristic curves obtained in case of various supply pressure, when output pressure is represented in a normalized expression, are identical ; the time constant which represents the dynamical performance of the micrometer varies as a function of the operating pressure; the time constant increases in proportion to the operating pressure up to a maximum value and then decreases, and such tendency and its magnitude is almost independent with the supply pressure.