Present and Future Technologies of Precision and Ultraprecision Positioning

Journal of the Japan Society for Precision Engineering

Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289

Present and Future Technologies of Precision and Ultraprecision Positioning

Jiro OTSUKA, Sadaji HAYAMA, Yasuji OHASHI

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Keywords: precision positioning, ultraprecision positioning, high precision, high speed, small resolution, actuator, mechanical element, stepper, machine tool

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2001 Volume 67 Issue 2 Pages 173-178

DOI https://doi.org/10.2493/jjspe.67.173

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