Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Speed Up of Precision/Ultraprecision Positioning
Ball Screw vs. Linear Motor
Osamu HORIUCHI
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Keywords: positioning, ball screw, linear motor, table, lithography, machine tool
JOURNAL FREE ACCESS

2001 Volume 67 Issue 2 Pages 179-183

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