微粒AlN粉末の燃焼合成における水素およびフッ化アンモニウムの添加効果と生成粉末の焼結特性

抄録

The reaction temperature in the combustion synthesis of AlN was controlled by adding H₂ gas to the reactant N₂ gas in order to reduce the particle size of the products. The addition of 20 vol.% H₂ to reactant N₂ gas decreased the combustion temperature from 2680 K to 2300 K. This led to an increase in specific surface area (SSA) of the product from 1.02 m² · g^-1 to 1.58 m² · g^-1. When 1.0 mass% of NH₄F was added to the mixture of the raw Al powder and the AlN diluent, the residual Al was reduced from 1700 ppm to 200 ppm. The AlN powder synthesized with the addition of 10 vol.% of H₂ gas and 1.0 mass % of NH₄F was fully densified at 1810°C under 0.11 MPa of N₂ pressure for 180 min. The thermal conductivity of the sintered AlN measured by laser flash method was 160 W · m^-1K^-1.