抄録
A simulation system for newly developed magnetic micro actuator is proposed and demonstrated in this paper. Magnetic energy and elastic deformation energy are formulated and used to derive deformation of the actuator. The deformation is determined by using the steepest descent method as the total energy is minimized.
We prepare two types of actuators to demonstrate reliability of the developed simulation system. Deformation patterns observed here show good agreement with simulated ones. A grid type actuator deformed through multiple stages. This characteristic manner was also observed virtually in the simulation system. This system would be useful to design a new arrangement of pillar structures of the present actuator.
