抄録
Fine particles of permalloy (80wt%Ni-20wt%Fe) were prepared by a CVD (chemical vapor deposition) method using the original quartz reactor. The mixture of FeCl2 and NiCl2 was vaporized and reduced to Ni-Fe fine particles in H2 flow. The average particle diameter was 0.17 micrometer. The particle composition was controlled by the change of the reaction temperature and reaction time. The initial permeability and density of 80wt%Ni-20wt%Fe particles synthesized at 950°C were almost the same to those of the bulk alloys.
