抄録
Zinc oxide thin films were well known to grow parallel to the C-axis, a (002) oriented film, on various substrates. To utilize for the SAW (Surface Acoustic Wave) devices, a (110) textured and high resistivity films are necessary. By considering the binding style, the (110) oriented film devices could be obtained. In this paper, the resistivity controlling of ZnO films having the controlled texture to apply for the SAW filter and the transparent conducting film is discussed.
