抄録
Ferroelectric PZT thick films were deposited on Ni coated SiO/Si substrates by jet printing method. Material powder was commercially used PZT fine particles which had mean diameter of 1.2μm. The shape of deposited films is 5.5mm in width and its thickness can be controlled in the range of several to several tenth um. After heat treatment of maximum temperature of 873K for 1.8ks in air, dielectric constant of 740 and dielectric loss tangent of 0.024 at 1kHz, and dielectric strength of 5MV/m were measured. The defect-free structure of the cross section of thick films was observed by SEM, and the polycrystallized PZT pattern of the surface was characterized by X-ray diffraction. Aerosol jet printing system is expected to utilize as deposition of dielectric thick films.
