抄録
In order to obtain the uniform thickness of Al2O3 film coated through TiC and TiN films on WC-βt-Co cemented carbide tools by CVD, the effect of CO2 content in the atmosphere, gas pressure, the amount of gas flow, etc. on deposition rate, microstructure and quality of Al2O3 film were mainly studied.It was found that the deposition rate of Al2O3 film increased and the difference in film thickness between edge and flat of specimen decreased, with increasing CO2 content. It was suggested that the strength of Al2O3 film and adhesive strength between Al2O3 and TiN-TiC films were not affected by CO2 content in CVD atmosphere.
