抄録
Mnl.xZnxFe2O4 (0≤X≤1) films were prepared by using a dual source evaporation apparatus added with an r.f.generator of 13.56MHz. When as-deposited films were annealed in a reduced atmosphere at 900°C for 5 hours, spinel-type ferrite films with single phase were formed. The films were crystal-oriented to <110> direction of the spinel structure. Mn0.7Zn0.3Fe2O4 film had the value of saturation magnetization of 485 emu/cc (0.61 Wb/m2), coercive force of 30 Oe (2.4 kA/m) and initial permeability of 550 respectively. The μ-T curve of the Mn0.7Zn0.3Fe2O4 film was appreciably different from that of the bulk Mn-Zn ferrite, because it was a solid solution composed of Mn-Zn ferrite and magnetite.
