Measurement of Vacuum Ultraviolet Radiation with Diamond Photo Sensors

抄録

A thin-film diamond UV sensor is a solar-blind photo detector sensitive to only vacuum ultraviolet regions. We have used this sensor to measure the intensity of vacuum ultraviolet light emitted from a xenon excimer lamp, a short-wavelength light source, and the sensor has shown stable sensitivity over 98-hour radiation with an irradiance of 10mW/cm² of xenon excimer lamp. Therefore, the diamond UV sensor is promising as a photo detector able to measure vacuum ultraviolet radiation, the use of which is increasing.