抄録
In this paper the phenomena of mode transition and hysteresis in xenon ICP (Inductively Coupled Plasma) discharge are studied. Xenon has been used as an alternative for mercury since there are environmental issues related to mercury. The transition from E-mode (electrostatic mode) discharge to H-mode (electromagnetic mode) discharge in a xenon cylindrical tube was investigated. RF energy at 13.56 MHz was induced to the tube through matching network. In this study, all the transitions occurred at a certain threshold input power which is a function of the xenon pressure. Hysteresis was observed as the input power was varied from 1 to 100 W. When the input power is increased the discharge starts in E-mode changes into H-mode, whereas when the input power is decreased the H-mode turns into the E-mode or there is a sudden switch-off as the function of the gas pressures. Mode transition is determined by sudden and huge change of luminance. H-mode is characterized by a much higher luminance and plasma density. Luminance and optical emission spectra were recorded. At high pressure more power is required to transform the discharge mode compared to low pressure. Continuum visible emission was obtained only in H-mode. At H-mode, many ionic and atomic spectrum are observed compared to E-mode. With high luminance and continuum visible emission that obtained from H-mode xenon ICP discharge, xenon is one of the most suitable alternatives in developing mercury-free light sources.
